Introduction to Microscale and Nanoscale Manufacturing


This course is part of the UCLA Henry Samueli School of Engineering and Applied Science (HSSEAS) Master of Science in Engineering Online (MSOL) program.  It is available only to students pre-approved by HSSEAS. For more information please contact


About this course:

MAE M183B Introduction to Microscale and Nanoscale Manufacturing (Instructor: Prof. Ju, Y-S.) (Same as Biomedical Engineering CM150 and Elec­trical Engineering CM150.) Lecture, four hours; dis­cussion, one hour; outside study, seven hours. Req­uisites: Chemistry 20A, 20L, Physics 1A, 1B, 1C, 4AL, 4BL. Corequisite: course CM180L. Introduction to micromachining technologies and microelectrome­chanical systems (MEMS). Methods of micromachin­ing and how these methods can be used to produce variety of MEMS, including microstructures, mi­crosensors, and microactuators. Students design mi­crofabrication processes capable of achieving de­sired MEMS device. Concurrently scheduled with course CM280A. Letter grading.

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