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Materials Science of Thin Films
This course is part of the UCLA Henry Samueli School of Engineering and Applied Science (HSSEAS) Master of Science in Engineering Online (MSOL) program. It is available only to students pre-approved by HSSEAS. Please contact msol.ucla.edu for more information.
About this course:MSE 223 Materials Science of Thin Films (Instructor: Goorsky, M.S. & Sadhu, R.) Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 131. Fabrication, structure, and property correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading.
Winter 2024 Schedule